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Press Release for Aerotech

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LOW-PROFILE XY LINEAR MOTOR STAGES FROM AEROTECH
FOR HIGH DYNAMIC AND QUASI-STATIC APPLICATIONS

New PlanarDLA features direct drive for high speed and accurate positioning

Aerotech (www.aerotech.com) has introduced a series of integrated open-frame stages with precise geometric performance and micrometer-level straightness. The new PlanarDLA stages include high precision roller bearings, precision machined surfaces and non-contact linear motors that drive through the axes’ center of stiffness. These features result in straightness to ±0.5µm and flatness to ±1.25µm.

Applications include:

  • Semiconductor manufacturing
  • Electronics manufacturing (LEDs)
  • Test & Inspection
  • Laser Processing
  • Metals inspection
  • Micro-machining
  • Nanotechnology
  • Medical
  • Laboratory
  • ​Optical metrology
  • Wafer processing​
  • Metrology
  • Automation

The low-profile stages are designed for a wide range of applications from highly dynamic two-sided LED wafer processing to quasi-static optical metrology. There are nine models in the series to accommodate customer requirements for travel and accuracy.

The PlanarDLA enables high-throughput, high-accuracy processing with 2 m/s velocities and 2 g accelerations, resulting in superior process yield and a low total cost of ownership. It achieves high servo bandwidths while maximizing the clear aperture available and keeping the overall height to a minimum.

Aerotech’s proprietary direct-drive technology offers high speed and accurate positioning coupled with maintenance-free operation and long service life. The stages are available with one or two motors per axis allowing optimization of each axis for the specific application and process.

Aerotech is a leading global supplier of positioning and motion control products for industry, government, science and research institutions. Its products provide critical performance for demanding applications requiring high precision, high-throughput motion control solutions.

Photo Caption:
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PlanarDLA XY linear motion stages from Aerotech provide high throughput, high accuracy processing for applications where straightness and flatness are critical.

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Product Sales Contacts:

Australia
Coherent Scientific Pty Ltd
Phone: +61 8 8150 5200
Fax: +61 8 8352 2020
sales@aerotech.com

CHINA
AEROTECH CHINA
Runfree Xu
Phone: +86 (21) 3319 7715
rxu@aerotech-china.com
www.aerotech.com

TAIWAN
AEROTECH TAIWAN
Phone: +886 (0)2 8751 6690
wyeh@aerotech.tw
www.aerotech.com

INDIA
LIBERTY INTERNATIONAL
Phone: +91 079-2692-6360
FAX: +91 079-2692-6380
salesindia@aerotech.com
www.aerotech.com

JAPAN
AEROTECH JAPAN
Phone: +81 (0)50 5830 6821
Fax: +81 (0)43 306 3773
sales@aerotechkk.co.jp
www.aerotech.com

MALAYSIA
Plant & Mill Motion Control Sdn Bhd
Phone: +(604) 645 1861
Fax: +(604) 644 8543
sales@aerotech.com
www.aerotech.com

SINGAPORE
Plant & Mill Supplies Pte Ltd
Singapore Office
Phone: +(65) 6542 4211
Fax: +(65) 6542 1318
sales@aerotech.com
www.aerotech.com

THAILAND
PMC Technology Co. 
Phone: +(662) 667 4501
Fax: +(662) 667 4506
bangkok.sales@pmsupplies.com
www.aerotech.com